Remote Epitaxy: Fundamentals, Challenges, and Opportunities.
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DOI: 10.1021/acs.nanolett.3c04465
Abstract: Advanced heterogeneous integration technologies are pivotal for next-generation electronics. Single-crystalline materials are one of the key building blocks for heterogeneous integration, although it is challenging to produce and integrate these materials. Remote epitaxy is recently… read more here.
Keywords: remote epitaxy; challenges opportunities; epitaxy fundamentals; fundamentals challenges ... See more keywords