Equivalent electric circuit model of accurate ion energy control with tailored waveform biasing
Sign Up to like & getrecommendations! Published in 2022 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/ac4c27
Abstract: For atomic scale plasma processing involving precise, (an)isotropic and selective etching and deposition, it is required to precisely control the energy of the plasma ions. Tailored waveforms have been employed to bias the substrate table… read more here.
Keywords: energy; electric circuit; equivalent electric; ion energy ... See more keywords
Inversion of the Equivalent Electric Dipole Moment of Ship’s Corrosion-Related Static Electric Field in Frequency Domain
Sign Up to like & getrecommendations! Published in 2020 at "Mathematical Problems in Engineering"
DOI: 10.1155/2020/3486082
Abstract: When evaluating the ship’s underwater electric field stealth, the underwater electric potential or the underwater electric field is often used, but it is easily affected by the environment conditions. As a result, the evaluating accuracy… read more here.
Keywords: electric dipole; field; equivalent electric; dipole moment ... See more keywords
A Building Energy Management System Based on an Equivalent Electric Circuit Model
Sign Up to like & getrecommendations! Published in 2020 at "Energies"
DOI: 10.3390/en13071689
Abstract: In recent decades, many EU and national regulations have been issued in order to increase the energy efficiency in different sectors and, consequently, to reduce environmental pollution. In the building sector, energy efficiency interventions are… read more here.
Keywords: energy; based equivalent; energy management; equivalent electric ... See more keywords