Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe error separation
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DOI: 10.1007/s11465-017-0432-3
Abstract: With the development of new materials and ultra-precision processing technology, the sizes of measured objects increase, and the requirements for machining accuracy and surface quality become more exacting. The traditional measurement method based on reference… read more here.
Keywords: error; lateral shearing; error separation; shearing interferometry ... See more keywords