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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13122098
Abstract: Despite continuous developments of manufacturing technology for micro-devices and nano-devices, fabrication errors still exist during the manufacturing process. To reduce manufacturing costs and save time, it is necessary to analyze the effects of fabrication errors…
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Keywords:
influencing effects;
effects fabrication;
errors performances;
performances dielectric ... See more keywords