Measurement of six-degree-of-freedom geometric errors of a translation stage using three absolute position encoders
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DOI: 10.1088/1361-6501/ad21d2
Abstract: This paper presents an effective method for evaluating the geometric errors of precision translation stages. It quantifies the six degrees of freedom (6-DOF) absolute posture of a moving platform on the stage, where a phase-encoded… read more here.
Keywords: three absolute; geometric errors; errors translation; absolute position ... See more keywords