Essential design and fabrication considerations for the reliable performance of an electrothermal MEMS microgripper
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DOI: 10.1007/s00542-019-04363-w
Abstract: Over the past years, microelectromechanical systems (MEMS) have become a vital component within a wide range of technologies, making the study of their performance and operational reliability a very critical aspect for their correct functionality.… read more here.
Keywords: fabrication considerations; performance; essential design; design fabrication ... See more keywords