Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage
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DOI: 10.1002/asjc.1595
Abstract: Iterative control enables a significant control performance enhancement by learning feedforward command signals from previous tasks in a batch-to-batch fashion. The aim of this paper is to develop an approach to estimate the parameters of… read more here.
Keywords: control; estimation rational; performance; optimal estimation ... See more keywords