Transient and Stable Profiles During Anisotropic Wet Etching of Quartz
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DOI: 10.1109/jmems.2017.2707096
Abstract: This paper presents a comprehensive analysis of the transient (short-term) and stable (long-term) cross-sectional profiles of elongated trenches formed by anisotropic wet etching on Z-cut quartz. Because all quartz planes parallel (and near-parallel) to the… read more here.
Keywords: etch rate; term; anisotropic wet; quartz ... See more keywords