Nanolitography based on electrospun and etched nanofibers
Sign Up to like & getrecommendations! Published in 2021 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2021.111526
Abstract: Abstract In this study, we propose a new type of nanolithography procedure to fabricate orderly patterned metallic nanostructures using the electrohydrodynamic method and the reactive ion etching process. The electrohydrodynamic process parameters were tuned so… read more here.
Keywords: based electrospun; silver; nanolitography based; etched nanofibers ... See more keywords