LAUSR

Etching Behaviors of Sapphire's C- Plane Cavity

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2 Published in 2021 at "Surface Science"

DOI: 10.1016/j.susc.2021.121805

Abstract: Abstract Techniques to fabricate patterned sapphire substrates (PSSs) have attracted much attention in recent decades. Wet etching behaviors and crystalline sapphire processes are critical for PSSs applications to improve the performance of light-emitting diodes. This… read more here.

Keywords: plane; etching behaviors; sapphire; wet etching ... See more keywords