High-performance etching of multilevel phase-type Fresnel zone plates with large apertures
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DOI: 10.1016/j.optcom.2017.09.006
Abstract: Abstract To ensure the etching depth uniformity of large-aperture Fresnel zone plates (FZPs) with controllable depths, a combination of a point source ion beam with a dwell-time algorithm has been proposed. According to the obtained… read more here.
Keywords: large apertures; fresnel zone; zone plates; etching depth ... See more keywords