Articles with "etching fused" as a keyword



Photo from wikipedia

Electrical field-induced faceting of etched features using plasma etching of fused silica

Sign Up to like & get
recommendations!
Published in 2017 at "Journal of Applied Physics"

DOI: 10.1063/1.4991706

Abstract: This paper reports a previously unreported anomaly that occurs when attempting to perform deep, highly anisotropic etches into fused silica using an Inductively-Coupled Plasma (ICP) etch process. Specifically, it was observed that the top portion… read more here.

Keywords: fused silica; highly anisotropic; using plasma; plasma etching ... See more keywords