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Published in 2017 at "Nano letters"
DOI: 10.1021/acs.nanolett.7b02841
Abstract: Chemical vapor deposition (CVD) has been established as the most effective way to grow large area two-dimensional materials. Direct study of the etching process can reveal subtleties of this competing with the growth reaction and…
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Keywords:
etching hexagonal;
boron nitride;
hexagonal boron;
anisotropic etching ... See more keywords