LAUSR

Droplet etching with indium – Intermixing and lattice mismatch

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1 Published in 2019 at "Journal of Crystal Growth"

DOI: 10.1016/j.jcrysgro.2019.02.030

Abstract: Abstract In contrast to Indium droplets the usage of Ga or Al droplets for the local droplet etching (LDE) technique is well established. It has been shown previously that In-droplets or In-alloys can be used… read more here.

Keywords: etching indium; lattice mismatch; droplet etching;