Toward Controllable Wet Etching of Monocrystalline Silicon: Roles of Mechanically Driven Defects.
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DOI: 10.1021/acsami.2c04299
Abstract: Wet chemical etching is essential not only for processing silicon (Si) wafers but also for forming diverse structures, significantly promoting the development of the semiconductor industry. However, tight control of etched topography at the nanoscale… read more here.
Keywords: controllable wet; etching monocrystalline; roles mechanically; wet etching ... See more keywords