Review—Progress in Electrochemical Etching of Third-Generation Semiconductors
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DOI: 10.1149/2162-8777/acce03
Abstract: Third-generation semiconductors have richer and better properties than traditional semiconductors, and show promising application prospects in high-power, high-temperature, high-frequency, and optoelectronic devices. Therefore, they have gained increasing interest and received extensive research attention in recent… read more here.
Keywords: generation semiconductors; etching third; third generation; electrochemical etching ... See more keywords