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   Articles with "euv" as a keyword



New Homogeneous Dataset of Solar EUV Synoptic Maps from SOHO/EIT and SDO/AIA

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recommendations! Published in 2019 at "Solar Physics"

DOI: 10.1007/s11207-019-1563-y

Abstract: Synoptic maps of solar EUV intensities have been constructed for many decades in order to display the distribution of the different EUV emissions across the solar surface, with each map representing one Carrington rotation (i.e.… read more here.

Keywords: soho eit; synoptic maps; euv; sdo aia ... See more keywords
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Estimate of Plasma Temperatures Across a CME-Driven Shock from a Comparison Between EUV and Radio Data

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recommendations! Published in 2020 at "Solar Physics"

DOI: 10.1007/s11207-020-01686-0

Abstract: In this work, we analyze the evolution of an EUV wave front associated with a solar eruption that occurred on 30 October 2014, with the aim of investigating, through differential emission measure (DEM) analysis, the… read more here.

Keywords: radio data; analysis; euv; estimate plasma ... See more keywords

Optical properties and oxidation resistance of different transition metals for soft X-ray and EUV applications

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recommendations! Published in 2017 at "Thin Solid Films"

DOI: 10.1016/j.tsf.2017.01.016

Abstract: Abstract The results of a comparative study of Ru-, Mo-, Nb- and Pd- coatings designed for grazing angle applications in the soft X-ray and extreme ultraviolet (EUV) spectrum are presented. Optical properties and temporal stability… read more here.

Keywords: transition; optical properties; euv; oxidation resistance ... See more keywords

Mechanistic Advantages of Organotin Molecular EUV Photoresists.

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recommendations! Published in 2022 at "ACS applied materials & interfaces"

DOI: 10.1021/acsami.1c12411

Abstract: Extreme ultraviolet (EUV)-induced radiation exposure chemistry in organotin-oxo systems, represented by the archetypal [(R-Sn)12O14(OH)6](A)2 cage, has been investigated with density functional theory. Upholding existing experimental evidence of Sn-C cleavage-dominant chemistry, computations have revealed that either… read more here.

Keywords: molecular euv; euv; chemistry; advantages organotin ... See more keywords

Resolving In Situ Exposure Dynamics in a Chemically Amplified EUV Photoresist Using Table-Top EUV Photoemission Spectroscopy

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recommendations! Published in 2025 at "ACS Applied Materials & Interfaces"

DOI: 10.1021/acsami.5c09589

Abstract: Extreme ultraviolet (EUV) lithography has revolutionized the high-volume manufacturing of nanoscale components. The use of EUV light leads to ionization-driven chemistry in the imaging materials of lithography, the photoresists. The complex interplay of ionization, generation… read more here.

Keywords: euv photoemission; spectroscopy; table top; euv ... See more keywords
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Nowcasting Solar EUV Irradiance With Photospheric Magnetic Fields and the Mg II Index

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recommendations! Published in 2024 at "Space Weather"

DOI: 10.1029/2023sw003772

Abstract: A new method to nowcast spectral irradiance in extreme ultraviolet (EUV) and far ultraviolet (FUV) bands is presented here, utilizing only solar photospheric magnetograms and the Mg II index (i.e., the core‐to‐wing ratio). The EUV… read more here.

Keywords: photospheric magnetic; model; index; euv fuv ... See more keywords

Machine learning-assisted high-throughput prediction and experimental validation of high-responsivity extreme ultraviolet detectors

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recommendations! Published in 2025 at "Nature Communications"

DOI: 10.1038/s41467-025-60499-6

Abstract: Identifying materials with optimal optoelectronic properties for targeted applications represents both a critical need and a persistent challenge in optoelectronic device engineering. Machine learning models often depend on extensive datasets, which are typically lacking in… read more here.

Keywords: experimental validation; machine learning; prediction; extreme ultraviolet ... See more keywords

Organic–inorganic hybrid photoresists containing hexafluoroantimonate: design, synthesis and high resolution EUV lithography studies

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recommendations! Published in 2017 at "Materials Chemistry Frontiers"

DOI: 10.1039/c7qm00343a

Abstract: Although many organic polymer based photoresists are useful for patterning high resolution sub-20 nm technology nodes, many such resists suffer from poor sensitivity. One of the methods to address the problem of low sensitivity is… read more here.

Keywords: resolution; high resolution; organic polymer; sensitivity ... See more keywords

Extreme ultraviolet lithography reaches 5 nm resolution.

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recommendations! Published in 2024 at "Nanoscale"

DOI: 10.1039/d4nr01332h

Abstract: Extreme ultraviolet (EUV) lithography is the leading lithography technique in CMOS mass production, moving towards the sub-10 nm half-pitch (HP) regime with the ongoing development of the next generation high numerical aperture (high NA) EUV… read more here.

Keywords: lithography; resolution; ultraviolet lithography; extreme ultraviolet ... See more keywords

Xe laser-plasma EUV radiation source with a wavelength near 11 nm—Optimization and conversion efficiency

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recommendations! Published in 2019 at "Journal of Applied Physics"

DOI: 10.1063/1.5115785

Abstract: Xe laser-produced plasma with a gas-jet target is considered a promising λ = 11.2-nm radiation source for a possible extension of the EUV (Extreme UltraViolet) lithography. EUV spectra of the plasma radiation obtained with the aid of… read more here.

Keywords: laser; euv radiation; euv; conversion efficiency ... See more keywords

Self-consistent integrated modeling of combined hybrid discharge-laser produced plasma devices for extreme ultraviolet metrology

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recommendations! Published in 2023 at "Physics of Plasmas"

DOI: 10.1063/5.0147234

Abstract: Discharge- and laser-produced plasma (DLPP) devices are being used as light sources for extreme ultraviolet (EUV) generation. A key challenge for both, DPP and LPP, is achieving sufficient brightness to support the throughput requirements of… read more here.

Keywords: laser; discharge laser; euv; laser produced ... See more keywords