New Homogeneous Dataset of Solar EUV Synoptic Maps from SOHO/EIT and SDO/AIA
Sign Up to like & getrecommendations! Published in 2019 at "Solar Physics"
DOI: 10.1007/s11207-019-1563-y
Abstract: Synoptic maps of solar EUV intensities have been constructed for many decades in order to display the distribution of the different EUV emissions across the solar surface, with each map representing one Carrington rotation (i.e.… read more here.
Keywords: soho eit; synoptic maps; euv; sdo aia ... See more keywords
Estimate of Plasma Temperatures Across a CME-Driven Shock from a Comparison Between EUV and Radio Data
Sign Up to like & getrecommendations! Published in 2020 at "Solar Physics"
DOI: 10.1007/s11207-020-01686-0
Abstract: In this work, we analyze the evolution of an EUV wave front associated with a solar eruption that occurred on 30 October 2014, with the aim of investigating, through differential emission measure (DEM) analysis, the… read more here.
Keywords: radio data; analysis; euv; estimate plasma ... See more keywords
Optical properties and oxidation resistance of different transition metals for soft X-ray and EUV applications
Sign Up to like & getrecommendations! Published in 2017 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2017.01.016
Abstract: Abstract The results of a comparative study of Ru-, Mo-, Nb- and Pd- coatings designed for grazing angle applications in the soft X-ray and extreme ultraviolet (EUV) spectrum are presented. Optical properties and temporal stability… read more here.
Keywords: transition; optical properties; euv; oxidation resistance ... See more keywords
Mechanistic Advantages of Organotin Molecular EUV Photoresists.
Sign Up to like & getrecommendations! Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.1c12411
Abstract: Extreme ultraviolet (EUV)-induced radiation exposure chemistry in organotin-oxo systems, represented by the archetypal [(R-Sn)12O14(OH)6](A)2 cage, has been investigated with density functional theory. Upholding existing experimental evidence of Sn-C cleavage-dominant chemistry, computations have revealed that either… read more here.
Keywords: molecular euv; euv; chemistry; advantages organotin ... See more keywords
Organic–inorganic hybrid photoresists containing hexafluoroantimonate: design, synthesis and high resolution EUV lithography studies
Sign Up to like & getrecommendations! Published in 2017 at "Materials Chemistry Frontiers"
DOI: 10.1039/c7qm00343a
Abstract: Although many organic polymer based photoresists are useful for patterning high resolution sub-20 nm technology nodes, many such resists suffer from poor sensitivity. One of the methods to address the problem of low sensitivity is… read more here.
Keywords: resolution; high resolution; organic polymer; sensitivity ... See more keywords
Xe laser-plasma EUV radiation source with a wavelength near 11 nm—Optimization and conversion efficiency
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Applied Physics"
DOI: 10.1063/1.5115785
Abstract: Xe laser-produced plasma with a gas-jet target is considered a promising λ = 11.2-nm radiation source for a possible extension of the EUV (Extreme UltraViolet) lithography. EUV spectra of the plasma radiation obtained with the aid of… read more here.
Keywords: laser; euv radiation; euv; conversion efficiency ... See more keywords
Self-consistent integrated modeling of combined hybrid discharge-laser produced plasma devices for extreme ultraviolet metrology
Sign Up to like & getrecommendations! Published in 2023 at "Physics of Plasmas"
DOI: 10.1063/5.0147234
Abstract: Discharge- and laser-produced plasma (DLPP) devices are being used as light sources for extreme ultraviolet (EUV) generation. A key challenge for both, DPP and LPP, is achieving sufficient brightness to support the throughput requirements of… read more here.
Keywords: laser; discharge laser; euv; laser produced ... See more keywords
Inspection of Stochastic Defects With Broadband Plasma Optical Systems for Extreme Ultraviolet (EUV) Lithography
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2019.2963483
Abstract: As extreme ultraviolet (EUV) lithography enters high volume manufacturing (HVM) to enable the sub-7nm scaling roadmap, characterizing and monitoring defects that print at wafer level are of critical importance to yield. This is especially true… read more here.
Keywords: stochastic defects; euv; ultraviolet euv; inspection ... See more keywords
Extreme ultraviolet metalens by vacuum guiding
Sign Up to like & getrecommendations! Published in 2023 at "Science"
DOI: 10.1126/science.adg6881
Abstract: Extreme ultraviolet (EUV) radiation is a key technology for material science, attosecond metrology, and lithography. Here, we experimentally demonstrate metasurfaces as a superior way to focus EUV light. These devices exploit the fact that holes… read more here.
Keywords: extreme ultraviolet; vacuum guiding; euv; ultraviolet metalens ... See more keywords
High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector.
Sign Up to like & getrecommendations! Published in 2023 at "Optics express"
DOI: 10.1364/oe.485779
Abstract: We present high-speed and wide-field EUV ptychography at 13.5 nm wavelength using a table-top high-order harmonic source. Compared to previous measurements, the total measurement time is significantly reduced by up to a factor of five by… read more here.
Keywords: speed; euv; wide field; scmos detector ... See more keywords
Transverse Deflection for Extreme Ultraviolet Pellicles
Sign Up to like & getrecommendations! Published in 2023 at "Materials"
DOI: 10.3390/ma16093471
Abstract: Defect control of extreme ultraviolet (EUV) masks using pellicles is challenging for mass production in EUV lithography because EUV pellicles require more critical fabrication than argon fluoride (ArF) pellicles. One of the fabrication requirements is… read more here.
Keywords: transverse deflection; euv; extreme ultraviolet; deflection extreme ... See more keywords