A stand‐alone compact EUV microscope based on gas‐puff target source
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Microscopy"
DOI: 10.1111/jmi.12494
Abstract: We report on a very compact desk‐top transmission extreme ultraviolet (EUV) microscope based on a laser‐plasma source with a double stream gas‐puff target, capable of acquiring magnified images of objects with a spatial (half‐pitch) resolution… read more here.
Keywords: microscopy; microscope; source; gas puff ... See more keywords
High-aperture EUV microscope using multilayer mirrors and a 3D reconstruction algorithm based on z-tomography.
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.475032
Abstract: The article is devoted to the development of an EUV microscope using a wavelength of 13.84 nm. Due to the use of a mirror lens with a large numerical aperture, NA = 0.27, and a short depth of… read more here.
Keywords: high aperture; euv microscope; microscope; microscope using ... See more keywords