Methodology to evaluate the uncertainty associated with nanoparticle dimensional measurements by SEM
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DOI: 10.1088/1361-6501/ab1495
Abstract: Scanning Electron Microscopy (SEM) technique is widely used for characterizing nanoparticle (NP) size but very few papers deal with NP dimensional metrology. This article reports on the methodology to evaluate the uncertainty budget associated with… read more here.
Keywords: evaluate uncertainty; diameter; methodology evaluate; methodology ... See more keywords