Evaluating a Procedure to Align Local Laser Doping and Metallization
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DOI: 10.1109/jphotov.2020.2966833
Abstract: We evaluate a procedure that is meant to ensure a highly accurate alignment between laser-doped lines and either screen-printed metal contacts or laser contact openings (LCO) for subsequent galvanic plating of the metal contacts. For… read more here.
Keywords: procedure align; laser doped; procedure; laser ... See more keywords