Evaluation of electron tomography reconstruction methods for interface roughness measurement
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DOI: 10.1002/jemt.23006
Abstract: We evaluate the suitability of simultaneous iterative reconstruction technique (SIRT), filtered back projection, and simultaneous algebraic reconstruction technique methods for buried interface roughness measurements. We also investigate the effect of total electron dose distributed over… read more here.
Keywords: reconstruction; evaluation electron; roughness measurement; electron tomography ... See more keywords