Ultra-smooth e-beam evaporated amorphous silicon thin films – A viable alternative for PECVD amorphous silicon thin films for MEMS applications
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DOI: 10.1016/j.matlet.2017.03.158
Abstract: In this paper, we demonstrate the applicability of ultra-smooth e-beam evaporated amorphous silicon thin films ( read more here.
Keywords: silicon thin; beam evaporated; thin films; silicon ... See more keywords