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Published in 2019 at "Vacuum"
DOI: 10.1016/j.vacuum.2019.01.052
Abstract: Abstract This study reports on the temperature-induced, ambient-air-exposure related structural and morphological evolution of various Al Cr and Al Cr O thin films prepared by cathodic arc evaporation with 20 sccm Ar, 50 sccm O2,…
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Keywords:
cathodic arc;
arc evaporated;
oxidation;
evaporated coatings ... See more keywords