Stress evolution of Ge nanocrystals in dielectric matrices.
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DOI: 10.1088/1361-6528/aaaffa
Abstract: Germanium nanocrystals (Ge NCs) embedded in single and multilayer silicon oxide and silicon nitride matrices have been synthesized using plasma enhanced chemical vapor deposition followed by conventional furnace annealing or rapid thermal processing in N2… read more here.
Keywords: nanocrystals dielectric; evolution nanocrystals; dielectric matrices; stress ... See more keywords