Tuning the thickness of exfoliated quasi-two-dimensional β-Ga2O3 flakes by plasma etching
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DOI: 10.1063/1.4979028
Abstract: We demonstrated the thinning of exfoliated quasi-two-dimensional β-Ga2O3 flakes by using a reactive ion etching technique. Mechanical exfoliation of the bulk β-Ga2O3 by using an adhesive tape was followed by plasma etching to tune its… read more here.
Keywords: exfoliated quasi; quasi two; ga2o3; ga2o3 flakes ... See more keywords