Coefficient of thermal expansion and biaxial Young's modulus in Si-rich silicon nitride thin films
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DOI: 10.1116/1.5020432
Abstract: The coefficient of thermal expansion (α) and biaxial Young's modulus is determined by comparing the differential thermal stress induced in Si-rich silicon nitride thin films deposited on single-crystal Si and sapphire substrates. The amorphous films… read more here.
Keywords: coefficient thermal; young modulus; expansion biaxial; biaxial young ... See more keywords