Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel
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DOI: 10.1016/j.mee.2020.111395
Abstract: Abstract Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for… read more here.
Keywords: fabrication clamped; fabrication; clamped clamped; clamped beam ... See more keywords