Fabrication and First Characterization of Silicon-Based Full 3-D Microdosimeters
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DOI: 10.1109/tns.2020.3035077
Abstract: Microdosimetry provides measurements of stochastic lineal energy deposition in a micrometric sensitive volume (SV) that are comparable to human cell dimensions, typically in the order of 10–15 $\mu \text{m}$ in diameter. Silicon-based microdosimeters have been… read more here.
Keywords: first characterization; fabrication first; silicon; characterization silicon ... See more keywords