Mass Sensing for the Advanced Fabrication of Nanomechanical Resonators
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DOI: 10.1021/acs.nanolett.9b02351
Abstract: We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID)… read more here.
Keywords: mass sensing; fabrication nanomechanical; advanced fabrication; method ... See more keywords