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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13081297
Abstract: In recent years, the demand for optical components such as microlenses has been increasing, and various methods have been developed. However, fabrication of submillimeter microlenses with tunable numerical aperture (NA) on hard and brittle materials…
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Keywords:
femtosecond laser;
submillimeter;
fabrication submillimeter;
laser fabrication ... See more keywords