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Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/0960-1317/27/1/017001
Abstract: A mechanical stop mechanism is developed in order to compensate MEMS fabrication tolerances in discrete positioning. The mechanical stop mechanism is designed to be implemented on SOI wafers using a common DRIE etching process. The…
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Keywords:
fabrication tolerances;
stop mechanism;
mechanical stop;
mechanism ... See more keywords
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Published in 2022 at "Optics express"
DOI: 10.1364/oe.470212
Abstract: Electro-optical modulators are essential for scalable photonic integrated circuits and are promising for many applications. The convergence of silicon (Si) and lithium niobate (LN) allows for a compact device footprint and large-scale integration of modulators.…
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Keywords:
180 ghz;
fabrication;
sandwiched lnoi;
fabrication tolerances ... See more keywords