Articles with "fabrication tolerances" as a keyword



Photo from wikipedia

Mechanical stop mechanism for overcoming MEMS fabrication tolerances

Sign Up to like & get
recommendations!
Published in 2017 at "Journal of Micromechanics and Microengineering"

DOI: 10.1088/0960-1317/27/1/017001

Abstract: A mechanical stop mechanism is developed in order to compensate MEMS fabrication tolerances in discrete positioning. The mechanical stop mechanism is designed to be implemented on SOI wafers using a common DRIE etching process. The… read more here.

Keywords: fabrication tolerances; stop mechanism; mechanical stop; mechanism ... See more keywords
Photo by laurentzziu from unsplash

Engineering a sandwiched Si/I/LNOI structure for 180-GHz-bandwidth electro-optic modulator with fabrication tolerances.

Sign Up to like & get
recommendations!
Published in 2022 at "Optics express"

DOI: 10.1364/oe.470212

Abstract: Electro-optical modulators are essential for scalable photonic integrated circuits and are promising for many applications. The convergence of silicon (Si) and lithium niobate (LN) allows for a compact device footprint and large-scale integration of modulators.… read more here.

Keywords: 180 ghz; fabrication; sandwiched lnoi; fabrication tolerances ... See more keywords