Post-Fabrication Trimming of Silicon Photonic Ring Resonators at Wafer-Scale
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DOI: 10.1109/jlt.2021.3079801
Abstract: Silicon ring resonator-based devices, such as modulators, detectors, filters, and switches, play important roles in integrated photonic circuits for optical communication, high-performance computing, and sensing applications. However, the high sensitivity to fabrication variations has limited… read more here.
Keywords: fabrication; fabrication trimming; wafer scale; post fabrication ... See more keywords