Discharge state transition and cathode fall thickness evolution during chromium HiPIMS discharge
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DOI: 10.1063/1.4995482
Abstract: The temporal evolutions of target voltage and current waveforms under different pulse voltage and working pressure conditions were studied during Cr high power impulse magnetron sputtering discharges. Target voltage and current characteristics demonstrated that when… read more here.
Keywords: discharge; cathode fall; hipims discharge; fall thickness ... See more keywords