Reproducibility of a Plasma Production in a Fast- and Automatically-controlled Radio Frequency Plasma Source
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DOI: 10.1109/tps.2020.2987554
Abstract: Reproducibility of the plasma production by using a fast- and automatically-controlled radio frequency (RF) plasma source with a magnetic field is investigated, where a frequency-tunable RF generator including a controller board is used to supply… read more here.
Keywords: plasma source; fast automatically; power; plasma production ... See more keywords