Enhanced permeability dielectric FeCo/Al2O3multilayer thin films with tailored properties deposited by magnetron sputtering on silicon
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DOI: 10.1063/1.5079477
Abstract: We have studied the structural and magnetic properties of enhanced-permeability-dielectric FeCo/Al2O3-multilayer thin films deposited on 8"-Si wafers in an industrial magnetron sputtering system. The EPD-multilayers consist of 25 periods of alternating nanometer-thick FeCo-layers deposited by… read more here.
Keywords: feco layers; thin films; feco; al2o3 ... See more keywords