Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2018.2842756
Abstract: The feedforward controller plays an important role in the achievement of high servo performance of wafer scanning. In this paper, a novel data-driven feedforward tuning method is developed in the presence of noise. Three distinguished… read more here.
Keywords: based instrumental; iterative feedforward; instrumental variables; feedforward tuning ... See more keywords
An Adaptive Data-Driven Iterative Feedforward Tuning Approach Based on Fast Recursive Algorithm: With Application to a Linear Motor
Sign Up to like & getrecommendations! Published in 2023 at "IEEE Transactions on Industrial Informatics"
DOI: 10.1109/tii.2022.3202818
Abstract: The feedforward control can effectively improve the servo performance in applications with high requirements of velocity and acceleration. The iterative feedforward tuning method (IFFT) enables the possibility of both removing the need for prior knowledge… read more here.
Keywords: adaptive data; feedforward tuning; iterative feedforward; data driven ... See more keywords