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Published in 2019 at "Microwave and Optical Technology Letters"
DOI: 10.1002/mop.31699
Abstract: There has been a continuing interest in finding ways to shrink the dimensions of electronic devices, especially active devices like transistors, down to become compatible with the ever decreasing size scales, using fabrication processes such…
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Keywords:
affected stresses;
electronic devices;
capacitance;
ferroelectric differential ... See more keywords