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Published in 2018 at "Nanotechnology"
DOI: 10.1088/1361-6528/aaacb1
Abstract: The electronic structure of oxygen-deficient Hf0.5Zr0.5O2 in the non-centrosymmetric orthorhombic (ferroelectric) phase was investigated by means of x-ray photoelectron spectroscopy and first-principle density functional theory calculations. It was established that a peak in the photoelectron…
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Keywords:
oxygen;
electronic structure;
oxygen vacancies;
hf0 5zr0 ... See more keywords
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Published in 2023 at "Nanomaterials"
DOI: 10.3390/nano13101608
Abstract: In this article, the endurance characteristic of the TiN/HZO/TiN capacitor was improved by the laminated structure of a ferroelectric Hf0.5Zr0.5O2 thin film. Altering the HZO deposition ratio, the laminated-structure interlayer was formed in the middle…
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Keywords:
endurance;
structure;
structure interlayer;
ferroelectric hf0 ... See more keywords