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Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.1c22426
Abstract: Doped HfO2 thin films, which exhibit robust ferroelectricity even with aggressive thickness scaling, could potentially enable ultralow-power logic and memory devices. The ferroelectric properties of such materials are strongly intertwined with the voltage-cycling-induced electrical and…
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Keywords:
layer;
interfacial layer;
field cycling;
ferroelectric hf1 ... See more keywords
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Published in 2019 at "Applied Physics Letters"
DOI: 10.1063/1.5090036
Abstract: Plasma assisted atomic oxygen deposition was used to grow polycrystalline ferroelectric Hf1-xZrxO2 (x = 0.5–0.7) on technologically important (100) Germanium substrates showing sharp crystalline interfaces free of interfacial amorphous layers and strong evidence for the presence of…
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Keywords:
oxygen deposition;
ferroelectric hf1;
assisted atomic;
plasma assisted ... See more keywords