Effect of dead layers on the ferroelectric property of ultrathin HfZrOx film
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DOI: 10.1063/5.0030856
Abstract: In this study, we investigate the effects of various electrodes on the ferroelectric properties of ultrathin HfZrOx (HZO) films. The ferroelectric polarization is totally suppressed in the HZO films with TiN and W bottom electrodes… read more here.
Keywords: ultrathin hfzrox; hzo films; property ultrathin; ferroelectric property ... See more keywords