Ferroelectricity in Atomic Layer Deposited Wurtzite Zinc Magnesium Oxide Zn1–x Mg x O
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DOI: 10.1021/acs.nanolett.5c02005
Abstract: Conformal deposition of wurtzite ferroelectrics, which is needed for their use in scaled nonvolatile memories, is challenging using current physical vapor deposition techniques. To overcome the conformality barrier, this work demonstrates ferroelectricity in wurtzite Zn1–x… read more here.
Keywords: magnesium; atomic layer; ferroelectricity atomic; deposition ... See more keywords