High-performance FET arrays enabled by improved uniformity of wafer-scale MoS2 synthesized via thermal vapor sulfurization
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DOI: 10.1016/j.apsusc.2019.04.016
Abstract: Abstract The fabrication of wafer-scale multilayers molybdenum disulfide (MoS2) induced by sulfurizing molybdenum (Mo) seed layer could compatible with traditional semiconductor process but the random growth orientations especially the vertical aligned structures lead to the… read more here.
Keywords: uniformity; fet arrays; mos2; wafer scale ... See more keywords