A New Generation Plasma FIB Column with Higher Probe Current and Improved Imaging Resolution
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DOI: 10.1017/s1431927620014580
Abstract: During past several years, plasma FIB has been established as a routine technique in semiconductor failure analysis and materials science. It offers a wide range of FIB applications like creating big and artefactfree cross sections… read more here.
Keywords: generation plasma; new generation; plasma fib; column higher ... See more keywords