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Published in 2019 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927619003581
Abstract: Compared to Ga+ liquid metal ion source (LMIS) DualBeam FIB-SEMs, Xe+ inductively couple plasma (ICP) DualBeams are relatively new [1]. Until recently, only Ga+ and Xe+ source technologies have been commercially available. LMIS Ga+ FIB…
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Keywords:
multiple ion;
latest developments;
developments multiple;
technology ... See more keywords