Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer
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DOI: 10.3390/mi9090455
Abstract: This paper presents a fibered-epitaxial lead zirconate titanate (PZT) thin film with intermediate features between the monocrystalline and polycrystalline thin films for piezoelectric micromachined ultrasound transducer (pMUT). The grain boundaries confirmed by scanning electron microscopy,… read more here.
Keywords: thin films; piezoelectric micromachined; thin film; fibered epitaxial ... See more keywords