Articles with "field microsensor" as a keyword



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An Electric Field Microsensor with Mutual Shielding Electrodes

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Published in 2021 at "Micromachines"

DOI: 10.3390/mi12040360

Abstract: This paper proposes an electric field microsensor (EFM) with mutual shielding electrodes. Based on the charge-induction principle, the EFM consists of fixed electrodes and piezoelectric-driving vertically-movable electrodes. All the fixed electrodes and movable electrodes work… read more here.

Keywords: shielding electrodes; field microsensor; electric field; mutual shielding ... See more keywords