Bulk Depolarization Fields as a Major Contributor to the Ferroelectric Reliability Performance in Lanthanum Doped Hf0.5Zr0.5O2 Capacitors
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DOI: 10.1002/admi.201901180
Abstract: After the discovery of ferroelectricity in HfO2, many dopants have been incorporated into the material to improve the ferroelectric properties. The binary mixture of HfO2 and ZrO2, HfxZrx−1O2, showed the widest process window in terms… read more here.
Keywords: bulk depolarization; 5zr0 5o2; hf0 5zr0; fields major ... See more keywords