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Published in 2017 at "IEEE Transactions on Components, Packaging and Manufacturing Technology"
DOI: 10.1109/tcpmt.2017.2711361
Abstract: In this paper, a millimeter-wave air-filled slot antenna is presented based on bulk silicon microelectromechanical systems micromachining technology. The antenna is suitable for system-in-package application by utilizing this silicon micromachining technique. To achieve high radiation…
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Keywords:
slot antenna;
millimeter wave;
air;
filled slot ... See more keywords