Low‐Temperature Atmospheric Pressure Plasma‐Enhanced CVD of Nanocomposite Coatings “Molybdenum Disulfide (Filler)–Silicon Oxide (Matrix)”
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DOI: 10.1002/admi.201700241
Abstract: The possibility of practical realization of a two-stage chemical vapor deposition (CVD) process using as an example of nanocomposite coating “molybdenum disulfide (filler)–silicon oxide (matrix)” is experimentally demonstrated for the first time. Deposition is performed… read more here.
Keywords: disulfide filler; microscopy; filler silicon; spectroscopy ... See more keywords