Fabrication of microlens arrays with high filling factors by combining a thermal reflow and parylene CVD technique and the applications on OLEDs.
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DOI: 10.1364/ao.452230
Abstract: In this paper, microlens array (MLA) templates with high filling factors were prepared by combining a thermal reflow method and parylene chemical vapor deposition (CVD). Then photoresist MLAs were replicated from the MLA templates by… read more here.
Keywords: combining thermal; photoresist mlas; high filling; filling factors ... See more keywords